Mechanisms of influence of electromagnetic films on conductive film structure of microcircuits

 

S. P. Arsenichev, E. V. Grigor’ev, S. A. Zuev, V. V. Starostenko, E. P. Taran

Taurida V.I. Vernadsky University
 

The paper is received on April 28, 2014

 

Abstract. The influence mechanisms of the electromagnetic fields are in-process considered and systematized on the conducting structures of integral microcircuits. The features of development of degradation processes are educed in thin film structures. The values of thicknesses of conducting films at that there is a process of transformation of energy of the electromagnetic field in acoustic waves are got.

Keywords: conducting film structures, influence mechanisms, transformation of energy.