Zhurnal Radioelektroniki - Journal of Radio Electronics. eISSN 1684-1719. 2021. No. 4
ContentsFull text in Russian (pdf)
DOI https://doi.org/10.30898/1684-1719.2021.4.1
UDC 628.953.2: 533.9.082.74:681.7.068
Deposition of planar waveguide structures with a fluorosilicate shell on silicon and quartz substrates in a local microwave discharge of reduced pressure
L. Yu. Kochmarev, I. P. Shilov
Fryazino Branch of Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, Vvedensky sq., 1, Fryazino Moscow region 141190, Russia
The paper was received on March 26, 2021
Abstract. An efficient method of gas-phase multilayer heterogeneous deposition of quartz and fluorosilicate glass in a non-isothermal plasma of a resonant local low pressure microwave discharge on quartz glass substrates and silicon wafers for the optical structures formation of waveguides and other waveguide elements based on them, is presented. It is shown that the nonisothermal plasma of a resonant local low pressure microwave discharge is an effective tool for the films formation on silicon and quartz substrates, both pure silicon dioxide and doped with fluorine. The cracks presence in films doped with fluorine is not observed even at their considerable thicknesses (20…60 µm). Deposition high rates and efficiency of silica glass doped with fluorine have been achieved (up to 7 wt.% of glass doping with fluorine at a film deposition rate of more than 3 μm/min). Planar and strip multimode and single-mode optical waveguides have been created. They are the basic structures of various fiber-optic components of local information transmission systems.
Key words: microwave plasma-chemical technology, plasmatron on the H10 wave, fluorosilicate nanolayers deposition, silicon wafers, stoichiometry, planar optical waveguide, integrated optical waveguides, silicon microelectronics, radiophotonics.
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For citation:
Kochmarev L.Yu., Shilov I.P. Deposition of planar waveguide structures with a fluorosilicate shell on silicon and quartz substrates in a local microwave discharge of reduced pressure. Zhurnal Radioelektroniki [Journal of Radio Electronics]. 2021. No.4. https://doi.org/10.30898/1684-1719.2021.4.1 (In Russian)