MANIPULATION OF MICRO- AND NANOOBJECTS APPLYING A DEVICE WITH SHAPE MEMORY EFFECT

 

A.V. Mashirov¹,V.A. Dikan², A.V. Irzhak², D.I. Zakharov², P.V. Mazaev¹,

A.M. Zhikharev¹, A.P. Kamantsev¹, V.S. Kalashnikov¹, V.V. Koledov¹,

A.V. Shelyakov³, V.G. Shavrov¹

¹Kotel’nikov Institute of Radio Engineering and Electronics of RAS, Moscow, Russia

² NUST «MISiS», Moscow, Russia

³ NUNT «MEPHI», Moscow, Russia

 

The paper is received on December 10, 2014

 

Abstract. This work describes creation and research of a device for grabbing micro- and nanoobjects, so called “nanotweezers”, with operating body made of two-layer composite material consisting of rapidly quenched layer of Ti₂NiCu with shape memory and amorphous layer of Pt. A certain way of manufacturing of such a material is proposed, by using localized ion etching and ion-beam stimulated chemical vapor deposition. Authors describe a construction of  “nanotweezers” they made using these techniques and also a series of experiments on grabbing and manipulation of real submicron-sized objects. A radiation of infrared semiconductor laser was used to perform actuation. A probability of manipulation of objects, like carbon nanotubes, graphene sheets, TaS₃ whiskers and biological objects, was shown experimentally.

Keywords: bimetallic composite material, manipulation of micro- and nanoobjects, nanotweezers, shape memory effect.