Abstract.
A method of obtaining composite coatings based on copper, aluminum - metals
used in the microwave by ion-beam modification with nitrogen and argon ions is
proposed. Ion microconstruction allowed us to develop a number of original
techniques for manufacturing microcomponents of microwave, to create
competitive analogues of existing technological processes using ion-beam
synthesis on the surface of metals of ultrafine nonporous carbon and
nitrogen-containing coatings with a unique combination of corrosive, electrical
and mechanical properties. The
dependence of the surface resistance of aluminum on the dose of embedded
nitrogen ions, the temperature coefficient of resistance of resistors based on
ion-modified aluminum films has been studied, a route for manufacturing thin-film
resistors for integrated circuits during the implantation of nitrogen ions with
accelerating voltage Uacc=40 kV and dose F=(2-8)×1015
ion/cm2. The formation of interlayer
microwave capacitors by ion-beam modification is based on the effects of activation
and passivation of the surface of ion-modified metal samples, including
passivation of a diamond-like carbon film with a non-porous film synthesized on
the surface of a metal substrate by implantation of argon ions with
accelerating voltage Uacc=75 kV and dose F=3000 μC/cm2.
The results of the study of the dependence of the operational characteristics
of capacitors and the percentage of yield of the mode of implantation of argon
ions are given.
Keywords: ion-beam modification, ultrafine
non-porous carbon coating, nitrogen-containing coating, thin-film capacitor,
thin-film resistor.
References
1. Labunov V.A. The development of micro-and nanoelectronics. V
Rossiysko-Yaponsky seminar «Oborudovaniye, tekhnologii i analiticheskiye
sistemy dlya materialovedeniya, mikro- i nanoelektroniki» [V Russian-Japan seminar
“Equipment, technology and analytical systems for materials science, micro- and
nanoelectronics”]. Saratov, 18-19.06.2007. Saratov, 2007. Vol.1. pp. 179-201. (In
Russian)
2. Gassanov L. G., Grusha S. A., Laurs Ye. P. Analogovyye monolitnyye
integral'nyye skhemy SVCH na osnove arsenida galliya. Obzory po E.T. Ser. I. Elektronika
SVCH [Analog monolithic microwave integrated circuits based on gallium
arsenideþ Reviews on electronic engineering. Series I.
Microwave Electronics]. Moscow, “TSNII Elektronika” Publ., 1984. Vol. 7 (1043).
pp. 25. In Russian)
3. Dorfman V. F. Sintez tverdotel'nykh struktur [Synthesis of
solid structures]. Moscow, Metallurgiya Publ., 1986. 176 p. (In Russian)
4. Perinskaya I.V., Perinskiy V.V., Lyasnikov V.N. Ionno-luchevaya
nanotekhnologiya i komponenty SVCH ustroystv [Ion-beam nanotechnology and
components of microwave devices]. Saratov, Publishing center «Nauka», 2012. 142
p. (In Russian)
5. Perinskaya I.V., Lyasnikov V.N., Perinskiy V.V. Instrumentation
design of implantation of argon ions and protons in technological applications.
Vestnik Saratovskogo gosudarstvennogo tekhnicheskogo universiteta – Proceedings
of Saratov Sate Technical University. 2008. No. 4(36). pp. 53-56. (In Russian)
6. Perinskaya, I.V. Electrotechnological analysis of applications of
argon-beam passivating metal processing ov. Vestnik Saratovskogo gosudarstvennogo
tekhnicheskogo universiteta – Proceedings of Saratov Sate Technical University,
2010. No. 2 (45). pp.98-100. (In Russian)
7. Perinskaya, I.V., Perinskiy V.V., Markelova O.A. Practical aspects
of nanostructural modification of materials by ion-beam treatment as the basic
method of cluster equipment. Vestnik Saratovskogo gosudarstvennogo tekhnicheskogo
universiteta – Proceedings of Saratov Sate Technical University, 2011. No.
1 (53). pp.71-77. (In Russian)
8. Perinskaya, I.V., Lyasnikov V.N., Perinskiy V.V., Muktarov O.D. Synthesis
of electroplasma hydroxyapatite coating on the surface of titanium by the
method of ion-beam processing. Perspektivnyye materialy – Perspective materials,
2013. No. 8. pp.52-57. (In Russian)
9. Perinskaya I.V., Lyasnikov V.N., Perinskiy V.V. Mechanisms of
influence of ion implantation on the chemical activity of metals. Tekhnologiya
metallov – Metal Technology. 2009. No. 8. pp. 22-25. (In Russian)