"JOURNAL OF RADIO ELECTRONICS" (Zhurnal Radioelektroniki ISSN 1684-1719, N 12, 2018

contents of issue      DOI  10.30898/1684-1719.2018.12.1     full text in Russian (pdf)  

Receiving carbon and nitrogen-containing layers on the surface of metals of integrated circuits of super-high frequencies ionic modifying

 

I. V. Perinskaya, V. V. Perinsky

Yuri Gagarin State Technical University of Saratov, Polytechnic street, 77, Saratov 410054, Russia

 The paper is received on November 22, 2018

Abstract. A method of obtaining composite coatings based on copper, aluminum - metals used in the microwave by ion-beam modification with nitrogen and argon ions is proposed. Ion microconstruction allowed us to develop a number of original techniques for manufacturing microcomponents of microwave, to create competitive analogues of existing technological processes using ion-beam synthesis on the surface of metals of ultrafine nonporous carbon and nitrogen-containing coatings with a unique combination of corrosive, electrical and mechanical properties. The dependence of the surface resistance of aluminum on the dose of embedded nitrogen ions, the temperature coefficient of resistance of resistors based on ion-modified aluminum films has been studied, a route for manufacturing thin-film resistors for integrated circuits during the implantation of nitrogen ions with accelerating voltage Uacc=40 kV and dose F=(2-8)×1015 ion/cm2. The formation of interlayer microwave capacitors by ion-beam modification is based on the effects of activation and passivation of the surface of ion-modified metal samples, including passivation of a diamond-like carbon film with a non-porous film synthesized on the surface of a metal substrate by implantation of argon ions with accelerating voltage Uacc=75 kV and dose F=3000 μC/cm2. The results of the study of the dependence of the operational characteristics of capacitors and the percentage of yield of the mode of implantation of argon ions are given.

Keywords: ion-beam modification, ultrafine non-porous carbon coating, nitrogen-containing coating, thin-film capacitor, thin-film resistor.

References

1.    Labunov V.A. The development of micro-and nanoelectronics. V Rossiysko-Yaponsky seminar «Oborudovaniye, tekhnologii i analiticheskiye sistemy dlya materialovedeniya, mikro- i nanoelektroniki» [V Russian-Japan seminar “Equipment, technology and analytical systems for materials science, micro- and nanoelectronics”].  Saratov, 18-19.06.2007. Saratov, 2007. Vol.1. pp. 179-201.  (In Russian)

2.    Gassanov L. G., Grusha S. A., Laurs Ye. P. Analogovyye monolitnyye integral'nyye skhemy SVCH na osnove  arsenida galliya. Obzory po E.T. Ser. I. Elektronika SVCH [Analog monolithic microwave integrated circuits based on gallium arsenideþ Reviews on electronic engineering. Series I. Microwave Electronics]. Moscow, “TSNII Elektronika” Publ., 1984. Vol. 7 (1043). pp. 25. In Russian)

3.    Dorfman V. F. Sintez tverdotel'nykh struktur [Synthesis of solid structures]. Moscow, Metallurgiya Publ., 1986. 176 p.  (In Russian)

4.    Perinskaya I.V., Perinskiy V.V., Lyasnikov V.N. Ionno-luchevaya nanotekhnologiya i komponenty SVCH ustroystv [Ion-beam nanotechnology and components of microwave devices]. Saratov, Publishing center «Nauka», 2012. 142 p. (In Russian)

5.    Perinskaya I.V., Lyasnikov V.N., Perinskiy V.V. Instrumentation design of implantation of argon ions and protons in technological applications. Vestnik Saratovskogo gosudarstvennogo tekhnicheskogo universiteta – Proceedings of Saratov Sate Technical University. 2008. No. 4(36).  pp. 53-56. (In Russian)

6.    Perinskaya, I.V. Electrotechnological analysis of applications of argon-beam passivating metal processing ov. Vestnik Saratovskogo gosudarstvennogo tekhnicheskogo universiteta – Proceedings of Saratov Sate Technical University, 2010. No. 2 (45). pp.98-100. (In Russian)

7.    Perinskaya, I.V., Perinskiy V.V., Markelova O.A. Practical aspects of nanostructural modification of materials by ion-beam treatment as the basic method of cluster equipment. Vestnik Saratovskogo gosudarstvennogo tekhnicheskogo universiteta – Proceedings of Saratov Sate Technical University, 2011. No. 1 (53). pp.71-77. (In Russian)

8.    Perinskaya, I.V., Lyasnikov V.N., Perinskiy V.V., Muktarov O.D. Synthesis of electroplasma hydroxyapatite coating on the surface of titanium by the method of ion-beam processing. Perspektivnyye materialy – Perspective materials, 2013. No. 8. pp.52-57. (In Russian)

9.    Perinskaya  I.V., Lyasnikov V.N., Perinskiy V.V. Mechanisms of influence of ion implantation on the chemical activity of metals. Tekhnologiya metallov – Metal Technology. 2009. No. 8. pp. 22-25. (In Russian)

 

For citation:
I. V. Perinskaya, V. V. Perinsky. Receiving carbon and nitrogen-containing layers on the surface of metals of integrated circuits of super-high frequencies ionic modifying. Zhurnal Radioelektroniki - Journal of Radio Electronics. 2018. No. 12. Available at http://jre.cplire.ru/jre/dec18/1/text.pdf

DOI  10.30898/1684-1719.2018.12.1