Journal of Radio Electronics. eISSN 1684-1719. 2023. №12
ContentsFull text in Russian (pdf)
DOI: https://doi.org/10.30898/1684-1719.2023.12.7
Optical properties of ultrathin Pd and Pt films
on a quartz substrate and on tungsten trioxide films
D.P. Kulikova, 1,2 A.S. Baburin, 1,3 A.Sh. Amiraslanov, 3 E.S. Lotkov, 1,3
I.A. Rodionov, 1,3 A.A. Pukhov, 4 A.V. Baryshev, 1 A.V. Dorofeenko 1,4,5
1Dukhov Research Institute of Automatics
127055, Russia, Moscow, Suschevskaya str, 222Faculty of Physics, M.V. Lomonosov Moscow State University
119991, Russia, Moscow, Leninskie Gory, 13FMN Laboratory, Bauman Moscow State Technical University
105082, Russia, Moscow, Rubtsovskaya emb., 2/184Institute for Theoretical and Applied Electromagnetics RAS
125412, Russia, Moscow Izhorskaya str., 135Kotelnikov IRE RAS
125009, Russia, Moscow, Mokhovaya str., 11b7
The paper was received October 6, 2023.
Abstract. Based on ellipsometry and transmission spectra, optical parameters of palladium and platinum films were determined. The Pd and Pt films had a thickness of 5 – 7 nm and were studied both on a SiO2 and WO3 substrates. Despite the extremely small thicknesses, the parameters of most films were well described by isotropic dielectric constant. An interesting feature was that films deposited directly on a SiO2 substrate had a positive (rather than negative, characteristic of a metal) real part of the effective dielectric constant, while the films deposited on WO3 exhibited metallic properties for unannealed films and properties characteristic of metal-dielectric composites for films that have been annealed (some of the films annealed at 300°C in argon retained their metallic properties).
Key words: gas sensors, optical nanostructures, gaschromic oxides, tungsten trioxide.
Financing: The study was supported by Russian Science Foundation (project no. 21-19-00138).
Corresponding author: Alexander Viktorovich Dorofeenko, adorofeenko@itae.ru
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For citation:
Kulikova D.P., Baburin A.S., Amiraslanov A.Sh., Lotkov E.S., Rodionov I.A., Pukhov A.A., Baryshev A.V., Dorofeenko A.V. Optical properties of ultrathin Pd and Pt films on a quartz substrate and on tungsten trioxide films. // Journal of Radio Electronics. – 2023. – №. 12. https://doi.org/10.30898/1684-1719.2023.12.7 (In Russian)