"JOURNAL OF RADIO ELECTRONICS" (Zhurnal Radioelektroniki ISSN 1684-1719, N 2, 2019

contents of issue      DOI  10.30898/1684-1719.2019.2.14     full text in Russian (pdf)  

UDC 620.3



S. V. Fongratovsky 1, V. V. Koledov 1, A. P. Orlov1, A. V. Frolov1, A. M. Smolovich1,
P. V. Lega 1, V. G. Shavrov 1, V. Ch. Fam1,2, A.V. Irzhak 3,4, T. Pekizeh 5, S. Bhatchatarria 6


1 Kotelnikov Institute of Radioengineering and Electronics of Russian Academy of Sciences, Mokhovaya 11-7, Moscow 125009, Russia

2 Moscow Institute of Physics and Technology (State University), Institutskiy lane 9, Dolgoprudny, Moscow Region 141701, Russia

 3 Institute of Microelectronic Technology and High Purity Materials of Russian Academy of Sciences, Ac. Osipyana 6, Chernogolovka, Moscow Region 142432, Russia

4 National University of Science and Technology MISiS, Leninskii pr. 4, Moscow 119049, Russia

5 Faculty of Electrical Engineering, K. N. Toosi University of Technology, Seyed-Khandan bridge, Shariati Ave., Tehran 163171419, Iran.

6 School of Physics University of the Witwatersrand, Wits Johannesburg 2050, South Africa


The paper is received on January 14, 2019


Abstract. The creation of 3D ordered nanostructures represents an important problem for scientific research, nano-electronics, and nano-sensorics, as a result of the fact that various nano-objects with useful physical and functional properties are synthesized by large arrays, but the selection, transfer and formation of three-dimensional nanostructures should be carried out using tools comparable in size to the manipulated nano-objects. This paper describes the results of fabricating of the samples of pig-tail and ring suspended structures of nanowires of different composition using the mechanical “bottom-up” assembling using nano-tweezers based on Ti2NiCu shape memory alloy. The nano-maripulation system used in the work includes a scanning electron microscope (SEM) and an ionic microscope with the focused ion beam system (FIB) CrossBeam Neon40 EsB (Carl Zeiss) with two Kleindiek nano-manipulators. The Kleindiek nanomanipulator is equipped with a nanogripper with a resistive microheater, which is located at the tip of a tungsten needle. The needle tip with nanogripper can be positioned with an accuracy of about 10 nm in the volume of the working chamber of the microscope. The nanotweezers are made of composite based on Ti2NiCu alloy with shape memory effect and have dimensions of 20x5x1 micron. The size of the controlled gap is 0 .... 1 μm. The temperature range of the thermoelastic martensitic transformation for this alloy is approximately 40-60 ° C. The process of nano-assembly of the functional structures in the configuration of rings, loops and suspended elements is carried out under the control of the SEM and includes operations: selection of individual nano-objects from a variety of pre-prepared, capture and separation of the nano-object, the formation of a functional structure, for example, rings and mechanical fastening to a substrate or in a three-dimensional construction, in a suspended state. Often, the nanowires of different nature form beams or “forest”, so an individual object, for example, a nanowire or its fragment, is held with the help of a nanogripper and is separated from the array. The formation of a loop or ring necessarily requires fixing at one point to impart torsional moment. Mechanical fixing can be accomplished using two nano-tweezers and two nano-manipulators. Electrical and mechanical contact can be achieved by applying ion-stimulated metal deposition in the FIB-CVD setup. A fixed nanowire can be bent or even twisted into a coil. As an example of the application of the proposed method, functional structures of CNTs decorated with Gd nanoparticles are presented.

Key words: nanowires, three-dimensional nanomanipulation, CNT, bottom-up nano-assembling, ring structures, pig-tail structures, shape memory effect, Ti2NiCu alloy.


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For citation:

S. V. Fongratovsky, V. V. Koledov, A. P. Orlov, A. V. Frolov, A. M. Smolovich, P. V. Lega, V. G. Shavrov, V. Ch. Fam, A.V. Irzhak, T. Pekizeh, S. Bhatchatarria. Creating nano-wire based ring, loopoing and suspended structures by the method of “bottom-up” mechanical nanosport. Zhurnal Radioelektroniki - Journal of Radio Electronics. 2019. No. 2. Available at http://jre.cplire.ru/jre/feb19/14/text.pdf

DOI  10.30898/1684-1719.2019.2.14