Zhurnal Radioelektroniki - Journal of Radio Electronics. eISSN 1684-1719. 2022. №2
ContentsFull text (pdf)
DOI: https://doi.org/10.30898/1684-1719.2022.2.8
FOR THE NANOMECHANICAL DEVICES
BASED ON ALLOYS WITH SHAPE MEMORY EFFECT
A.V. Prokunin 1,2, V.V. Koledov 2, D.D. Kuznetsov 2, A.V. Irzhak 3, A.P. Orlov 2, P.V. Lega 2
1 The Moscow Institute of Physics and Technology
1417019, Moscow Region, Dolgoprudny, Institutskiy per., 9
2 Kotelnikov IRE RAS, 125009, Moscow, Mokhovaya 11, korp.7
3 Institute of Microelectronics Technology and High-Purity Materials RAS
142432, Moscow Region, Chernogolovka, Academician Ossipyan str, 6
The paper was received February 15, 2022.
Abstract. Recent progress in design of nanomechanical tools with shape memory effect (SME) resulted in successful realization of the new systems for 3D nanomanipulation and bottom-up nanointegration of the nanoobjects like CNT, nanowires etc. SME demands controlled heating of the active layer of the shape memory nanotool. The heating can lead to thermal drift and errors in positioning of the nanotool. The paper presents the results of numerical modeling and experimental data on the thermal expansion of a heating element, including the tungsten microneedle depending on the configuration of its tip geometry. It is proved that the control system for nanomechanical devices including the microneedle with optimized profile demonstrates both improved precision of positioning and smaller electric energy consumption.
Key words: shape memory effect, nanotweezers, control system, microneedle.
Financing: Functional nanomaterials were developed and studied under support of RSF – grant №17-19-01748. The experiment on nanomanipulation is done with samples and procedures under support of RFBR – grant №18-57-70004.
Corresponding author: Prokunin Aleksei Vitalevich, prokunin.av@phystech.edu
1. Von Gratowski S., Koledov V., Shavrov V., Petrenko S., Irzhak A., Shelyakov A., Jede R. Advanced system for nanofabrication and nanomanipulation based on shape memory alloy. Frontiers in Materials Processing, Applications, Research and Technology. 2018. P.135-154. http://doi.org/10.1007/978-981-10-4819-7_13
2. Lega P., Kuchin D., Koledov V. et al. Simulation of control system for shape memory nanotweezers. Materials Science Forum. 2016. V.845. P.142-145. http://doi.org/10.4028/www.scientific.net/MSF.845.142
3. Zhikharev A., Irzhak A., Lega P., et. al. New system for manipulation of nanoobjects based on composite Ti2NiCu/Pt nanotweezers with shape memory effect. Journal of Physics: Conference Series. 2016. V.741. P.012206. http://dx.doi.org/10.1088/1742-6596/741/1/012206
4. Lega P., Koledov V., Kuchin D., et al. Simulation of the control process applied to the micromechanical device with the shape memory effect. Journal of coµmunications technology and electronics. 2015. V.60(10). P.1124-1133. http://dx.doi.org/10.1134/S1064226915100083
5. Zhikharev A., Beresin M., Lega P., et al. Thermally Controlled Nanoobjects Manipulation System Based on Composite Ti2NiCu/Pt Nanotweezers. 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M–NANO). 2016. P.101-104. https://doi.org/10.1109/3M-NANO.2016.7824943
For citation:
Prokunin A.V., Koledov V.V., Kuznetsov D.D., Irzhak A.V., Orlov A.P., Lega P.V. Control system optimization for the nanomechanical devices based on alloys with shape memory effect. Zhurnal radioelektroniki [Journal of Radio Electronics] [online]. 2022. №2. https://doi.org/10.30898/1684-1719.2022.2.8