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"JOURNAL OF RADIOELECTRONICS" N 1, 2000 | |
RESONATOR CONTROL OF
CONDUCTANCE HOMOGENEITY
OF SEMICONDUCTOR WAFERS
O.G.
Koshelev, E.A. Forsh
Department of Physics, Moscow State University
Received January 27, 2000
A metod to determine the conductivity dependence versus distance from the surface of a high resistivity semiconductor wafer is discussed (considerated). By one dimension computer calculations it was shown that this inverse problem may be solved by Q-factor measurements of open confocal resonator. The measurements have to made for several frequencies at four positions of the wafer in the resonator waist plane.
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