ASYMMETRIZATION OF SPATIAL DISTRIBUTION OF DELTA-DOPANT DURING OVERGROWTH

E.L. Pankratov
Institute for Physics of Microstructures, Nizhny Novgorod, Russia

Received January 4, 2007

The analysis of dopant dynamics in delta-doped area of a multilayer structure during overgrowth of the dopant by an overlayer has been done based on proposed in the paper "macroapproach". Some reasons of asymmetrization of dopant distribution, which has been recently shown by experiment did not detected by systematically used in papers “microapproach”, were illustrated. For an example of multilayer structure spreading of delta-layer estimation has been done .