SME AMORPHOUS-CRYSTALLINE COMPOSITE OBTAINED BY FOCUSED ION BEAM

V. S. Afonina¹, V. V. Koledov¹, V. A. Dikan², A. V. Irzhak^2,3, A. P. Kamantsev¹ 

1 - Kotelnikov Institute of Radio-engineering and Electronics of RAS, Moscow, Russia

2 - National University of Science and Technology «MISIS», Moscow, Russia

3 - Institute of Microelectronics Technology and High Purity Materials, Chernogolovka,  Moscow REgion, Russia

 

The paper is received on January 15, 2015

 

Abstract. The interaction of a focused ion beam of Ga⁺ with the  surface of the annealed rapidly quenched from the melt ribbons of the Ti2NiCu alloys was investigated. The amorphous-crystalline composites and microactuators based on rapidly quenched shape memory alloy Ti₂NiCu are obtained by Focused Ion Beam (FIB) treatment and studied. It is demonstrated that the amorphized layer may be formed by two types of impact: direct bombardment of the surface and material redeposition. Shape memory effect is demonstrated by reversible bending deformation during heating and cooling of the composites.

Key words: shape memory effect, bilayer composite, amorphization, Ti₂NiCu, microactuator, focused ion beam.