AMORPHOUS-CRYSTALLINE COMPOSITE OBTAINED BY FOCUSED ION BEAM
S. Afonina1, V.
V. Koledov1, V.
A. Dikan2, A.
V. Irzhak2,3, A.
1 - Kotelnikov Institute of Radio-engineering and Electronics of RAS
2 - National University of Science and Technology «MISIS»,
3 - Institute of Microelectronics Technology and High Purity Materials,
Moscow REgion, Russia
The paper is received on January 15, 2015
Abstract. The interaction of a
focused ion beam of Ga+ with the surface of the annealed rapidly
quenched from the melt ribbons of the Ti2NiCu alloys was investigated. The amorphous-crystalline
composites and microactuators based on rapidly quenched shape memory alloy Ti2NiCu
are obtained by Focused Ion Beam (FIB) treatment and studied. It is demonstrated
that the amorphized layer may be formed by two types of impact: direct
bombardment of the surface and material redeposition. Shape memory effect is demonstrated
by reversible bending deformation during heating and cooling of the composites.
Key words: shape memory effect, bilayer
composite, amorphization, Ti2NiCu, microactuator, focused ion beam.