Journal of Radio Electronics. eISSN 1684-1719. 2026. ¹1
Full text in Russian (pdf)
DOI: https://doi.org/10.30898/1684-1719.2026.1.2
OPTICAL AND MECHANICAL CHARACTERISTICS
OF ALUMINUM NITRIDE FILMS PRODUCED
BY MAGNETRON Sputtering
FOR HIGH-QUALITY SMR RESONATORS
À.Yu. Kuklev 1,2,3, V.I. Strunin 1,3, L.V. Baranova 1,3,
N.A. Davletkildeev 1,3, N.A. Chirikov 1,2
1 Omsk Scientific Center SB RAS,
644024, Russia, Omsk, Karl Marx Ave., 15
2 Omsk Scientific-Research Institute of Instrument Engineering,
644071, Russia, Omsk, Maslennikova St., 231
3 Dostoevsky Omsk State University,
644077, Russia, Omsk, Mira Ave., 55A
The paper was received November 20, 2025.
Abstract. The paper presents the results of a study of internal mechanical stresses and the refractive index of AIN thin films obtained by magnetron deposition at an operating pressure in a vacuum chamber of 0.1 Pa and 0.2 Pa. It is shown that the refractive index of the obtained films increases with an increase in the magnetron discharge power from 400 W to 1000 W at fixed pressures of 0.1 Pa and 0.2 Pa. The obtained values of mechanical stresses in a similar range of discharge power indicate a decrease in internal stresses with an increase in the operating pressure from 0.1 Pa to 0.2 Pa and are in the range from 2.65 GPa to 3.37 GPa and from -0.27 GPa to 1.84 GPa.
Key words: internal stresses, magnetron sputtering, aluminum nitride, piezoelectric resonator, thin films.
Financing: The work was carried out according to the state task of the Omsk Scientific Center SB RAS (project registration number 124022500291-6).
Corresponding author: Kuklev Alexander Yurievich, alexanderkuklev@mail.ru
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For citation:
Kuklev À.Yu., Strunin V.I., Baranova L.V., Davletkildeev N.A., Chirikov N.A. Optical and mechanical characteristics of aluminum nitride films produced by magnetron sputtering for high-quality SMR resonators // Journal of Radio Electronics. – 2026. – ¹. 1. https://doi.org/10.30898/1684-1719.2026.1.2 (In Russian)