WAVEGUIDE OPTICAL MICROSCOPY OF
Received June 20, 2007
The coherent waveguide
optical microscopy method based on the waveguide scattering phenomena is
described. The potentiality of this method is analyzed on the computer model.
It is demonstrated that for the given additive “white” noise when the level SNR
≈ 10 the elaborated by author algorithm permit to determine the
correlation radii of the effective surface roughness λ/60-15λ with an
error not grater than 5-25 % and the corresponding rms height 25-100 Å
with an error less than 5-35 %. Is shown, that the method of waveguide
scattering allows receiving statistical information for one measurement from
enough large area of surface (volume) with essential exceeding of diffraction
limit, i.e. allows passing in a nanometer range.