COHERENT WAVEGUIDE OPTICAL MICROSCOPY OF STATISTICAL MICROOBJECTS

A. A. Egorov
 

Received June 20, 2007 

The coherent waveguide optical microscopy method based on the waveguide scattering phenomena is described. The potentiality of this method is analyzed on the computer model. It is demonstrated that for the given additive “white” noise when the level SNR ≈ 10 the elaborated by author algorithm permit to determine the correlation radii of the effective surface roughness λ/60-15λ with an error not grater than 5-25 % and the corresponding rms height 25-100 Å with an error less than 5-35 %. Is shown, that the method of waveguide scattering allows receiving statistical information for one measurement from enough large area of surface (volume) with essential exceeding of diffraction limit, i.e. allows passing in a nanometer range.