Journal of Radio Electronics. eISSN 1684-1719. 2024. ¹7
Full text in Russian (pdf)
DOI: https://doi.org/10.30898/1684-1719.2024.7.3
PHOTOSENSITIVE CCD SENSORS DESIGNED
ON A SILICON EPITAXIAL STRUCTURE
À.Ì. Ìàklakov1,2, Å.V. Kaevitser3,4, D.À. Fedorov1
1Scientific & Production Enterprise "Pulsar",
105187, Russia, Moscow, Okrugnoy pr-t, 272MIREA – Russian Technological University,
119454, Russia, Moscow, Vernadskogo pr-t, 783Kotelnikov Institute of Radioengineering and Electronics of RAS,
141190, Russia, Moscow region, Fryazino, Vvedensky sq. 14National University of Science and Technology (MISiS),
119049, Russia, Moscow, Leninsky pr-t, 5
The paper was received April 19, 2024
Abstract. With the help of instrument-technological modeling, modulation transmission functions for two CCD structures operating in the time delay and accumulation mode were obtained.
Key words: resolution, CCD-matrix, TCAD modeling, matrix photodetector.
Corresponding author: Kaevitser Ekaterina Vladilenovna, katrin125@mail.ru
References
1. Ivanova G.A., Pugachev A.A. Metod modelirovaniya funktsii peredachi modulyatsii matrichnykh fotopriemnykh SBIS // Problemy razrabotki perspektivnykh mikro- i nanoehlektronnykh sistem — 2014. Sbornik trudov / Pod obshch. red. akademika RAN A. L. Stempkovskogo. M.: IPPM RAN, 2014. Chast' I. S. 65–70.
2. Ivanova G.A., Pugachev A.A., Puzyr'kov D.V., Shchelokov A.N. Fiziko-topologicheskoe modelirovanie razreshayushchei sposobnosti fotopriemnykh SBIS// Izvestiya YUFU. Tekhnicheskie nauki. ¹ 2. 2015 g.— S.246–254.
3. Pugachev A.A., Ivanova G.A., Puzyr'kov D.V., Shchelokov A.N., Gulyakovich G.N., Severtsev V.N. Avtomatizirovannoe proektirovanie fotochuvstvitel'nykh SBIS po kriteriyu razreshayushchei sposobnosti // Trudy II Rossiisko-Belorusskoi nauchno-tekhnicheskoi konferentsii «Ehlementnaya baza otechestvennoi radioehlektroniki: importozameshchenie i primeneniE» im. O. V. Loseva. 2015. — S. 144–148.
4. Kononov A.A., Pospelova M.A., Pugachev A.A., Sokolov S.V. Primenenie priborno-tekhnologicheskogo modelirovaniya pri proektirovanii fotochuvstvitel'nykh PZS i KMOPfotodiodnykh SBIS // Mezhdunarodnaya konferentsiya «Mikroehlektronika 2015». Integral'nye skhemy i mikroehlektronnye moduli: proektirovanie, proizvodstvo i primenenie. g. Alushta, 2015 g. Sbornik tezisov. Moskva: TEKHNOSFERA, 2015. — S. 236–238.
5. Klaus J. Engel*a, Lothar Spies a, Gereon Vogtmeier a, Randy Luhta Impact of CT detector pixel-to-pixel crosstalk on image quality// Proc. of SPIE Vol. 6142 61422F-1 / Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/16/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx
6. A.M. Maklakov. Otsenka vzaimovliyaniya kanalov perenosa fotochuvstvitel'nykh PZS s vremennoi zaderzhkoi i nakopleniem s pomoshch'yu priborno-tekhnologicheskogo modelirovaniya // Ehlektronnaya tekhnika, Seriya 2 poluprovodnikovye pribory, Vypusk 4 (265), s.s. 20-30, - M.:FGUP «NPP «Pul'saR», 2021
7. Maklakov A.M. Povyshenie razresheniya fotochuvstvitel'nykh mikroskhem na priborakh s zaryadovoi svyaz'yu// Mezhdunarodnaya nauchno-tekhnicheskaya konferentsiya. Opticheskie tekhnologii, materialy i sistemy (Optotekh - 2023) [Ehlektronnyi resurs]: Sbornik dokladov konferentsii «Opticheskie tekhnologii, materialy i sistemY» Instituta perspektivnykh tekhnologii i industrial'nogo programmirovaniya RTU MIREHA / Pod redaktsiei Yurasova A.N. — M.: RTU MIREHA, 2023.– s.446-452
8. Holst G.C. Electro-optical system performance. SPIE Optical Engineering Press, 2000
For citation:
Ìàklakov À.Ì., Kaevitser Å.V., Fedorov D.À. Photosensitive CCD sensors designed on a silicon epitaxial structure. //Journal of Radio Electronics. – 2024. – ¹.7. https://doi.org/10.30898/1684-1719.2024.7.3 (In Russian)