Journal of Radio Electronics. eISSN 1684-1719. 2025. ¹6

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DOI: https://doi.org/10.30898/1684-1719.2025.6.5

 

 

 

The effect of Ar and CO2 gas mixture composition

during sputtering of (Ba,Sr,Ca)CO3 films

on surface roughness and emission properties

 

G.A. Zhabin 1, Â.A. Loginov 2, A.B. Loginov 3, K.V. Shichalin 4

 

1 JSC «RPC «Istok» named after Shokin»

2a Vokzalnaya str., Fryazino, Moscow region, 141190

2 National Research University of ElectronicTechnology MIET

Shokin square 1, Moscow, Zelenograd, 124498

3 Lomonosov Moscow State University, Physical department

1 Leninskie Gory, Moscow, 119991

4 EPOS-Engineering,

1 Akademika Lavrentieva Ave., Novosibirsk, 630090

 

The paper was received March 6, 2025.

 

Abstract. The paper studies the influence of the composition of the Ar+CO2 gas mixture on the change in the chemical composition and morphology of emission coatings deposited using the ion-plasma method at a substrate holder temperature of 150-208 ºÑ. The grain size and surface roughness of the film are studied using scanning probe microscopy. The chemical composition of the deposited (Ba,Sr,Ca)CO3 films is studied using energy-dispersive X-ray analysis (EDXA). As the concentration of carbon dioxide in the gas mixture increases, the film grains enlarge to 1980 nm and lengthen, revealing an internal core nanostructure with an average transverse size of nanograins up to 181 nm. The influence of the gas composition on the deposition process and emission properties of molecularly sputter-deposited oxide microcathodes is shown.

Key words: ion plasma sputtering, scanning probe microscopy, surface morphology, emission characteristics, sputter-deposited oxide microcathodes, service life.

Corresponding author: Zhabin Gennady Anatolyevich, zhabingennady@yandex.ru

 

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For citation:

Zhabin G.A., Loginov B.A., Loginov A.B., Shichalin K.V. The effect of Ar and CO2 gas mixture composition during sputtering of (Ba,Sr,Ca)CO3 films on surface roughness and emission properties // Journal of Radio Electronics. – 2025. – ¹6. https://doi.org/10.30898/1684-1719.2025.6.5 (In Russian)