Journal of Radio Electronics. eISSN 1684-1719. 2026. ¹6
Full text in Russian (pdf)
DOI: https://doi.org/10.30898/1684-1719.2026.6.4
WITH AN ABSORBER SUSPENDED ABOVE THE SUBSTRATE
R.A. Yusupov 1, A.A. Gunbina 1, M.Yu. Fominsky 1,
A.M. Chekushkin 1, V.S. Edelman 2, M.A. Tarasov 1
1 Kotelnikov IRE RAS, 125009, Moscow, Mokhovaya str., 11, st.7
2 Kapitsa IPP RAS, 119334, Moscow, Kosygina str., 2
The paper was received May 8, 2026.
Abstract. This paper discusses the design of a highly sensitive subterahertz radiation detector based on a superconductor-insulator-normal metal-insulator-superconductor structure with an absorber suspended above the substrate. A technology for fabricating such structures using wet etching of aluminum is described. Detector designs for this structure are proposed that avoid superconductivity suppression in aluminum electrodes due to normal metal wiring. Using the proposed technology, aluminum-based structures with various normal metal absorber materials (hafnium, copper, palladium) were fabricated and studied. A setup for measuring the response of such structures to external radiation is described. The response to external radiation from a blackbody radiation source was measured, and the volt-watt sensitivities and technical noise equivalent power (TNEP) were calculated.
Key words: subterahertz detector, direct detector, bolometer, quantum detector, superconducting tunnel structures, superconductor-insulator-normal metal-insulator-superconductor structure, wet etching, magnetron sputtering.
Financing: The study was supported by grant No. 23-79-10262 from the Russian Science Foundation, https://rscf.ru/en/project/23-79-10262/
Corresponding author: Yusupov Renat Albertovich, yusupovrenat@hitech.cplire.ru
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For citation:
Yusupov R.A., Gunbina A.A., Fominsky M.Yu., Chekushkin A.M., Edelman V.S., Tarasov M.A. Subterahertz SINIS detector with an absorber suspended above the substrate // Journal of Radio Electronics. – 2026. – ¹. 6. https://doi.org/10.30898/1684-1719.2026.6.4 (In Russian)