"JOURNAL OF RADIO ELECTRONICS" (Zhurnal Radioelektroniki ISSN 1684-1719, N 3, 2019

contents of issue      DOI  10.30898/1684-1719.2019.3.5     full text in Russian (pdf)  

Development and research of two-layer anti-reflective coating SiO2 / ITO for solar cells based on amorphous silicon


P. A. Skulova 1, G. A. Loskutov 2

 1 Bauman Moscow State Technical University, 2 Baumanskaya str., Moscow 105005, Russia

 2 Moscow Industrial and Financial University “Synergy”, Leningradsky prosp. 80, Moscow 125190, Russia


The paper is received on March 9, 2019


Abstract. The article presents a study of a two-layer anti-reflective coating SiO2/ITO for solar cells based on amorphous silicon. As an introductory part, the device of modern solar elements is described, the principle of their operation is revealed. Information on the nature and function of antireflection coatings is given, and methods for producing a nano-scale layer under laboratory conditions are outlined. Coating modeling with thickness of SiO2 and ITO layers calculated in a special computer program is described. Modeling (build-up of layers) was carried out on installations of two types: vacuum magnetron sputtering and plasma chemical deposition.  As a result of the vacuum magnetron sputtering method, it is possible to obtain metals and dielectrics with antireflection coatings and contact pads. In the second case, the plasma-chemical deposition method was used. The installation allows the application of dielectric and semiconductor layers to the elements consisting of SiO2, Si3N4, a-Si: H, a-SiC: H. The current-voltage characteristics of the samples with and without SiO2 coated were built, and the results were compared. The analysis of the experimental data was carried out by measuring spectral characteristics (with and without deposition on a solar cell). Research results show that the efficiency of light conversion in the region of large wavelengths increases, but it decreases in the middle region of wavelengths for a given solar cell.

Keywords: solar cell, amorphous silicon, antireflection coating, magnetron sputtering, pin-junction, plasma-chemical deposition, optics, wavelength, semiconductor.


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For citation:

P. A. Skulova, G. A. Loskutov. Development and research of two-layer anti-reflective coating SiO2/ITO for solar cells based on amorphous silicon. Zhurnal Radioelektroniki - Journal of Radio Electronics. 2019. No. 3. Available at http://jre.cplire.ru/jre/mar19/5/text.pdf