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PRECISE LASER INTERFEROMETRY WITH 1 PM RESOLUTION

M. N. Dubrov and V. A. Alyoshin

A b s t r a c t

 The wide range laser interferometry technique having noise level up to 10-12 m is described. It is based on a precise interference fringe measuring servo-system with wide range displacement linearity. The r.m.s. deviation of displacement-to-voltage transform factor is below 1% in the range of 105 periods of the interference pattern shifts. The dynamic range of displacement amplitude capability is near of 210 dB. The system characteristics have been accurately tested and investigated. The examples of precise interferometer applications are shown.