Mechanisms of influence of electromagnetic films on conductive film
structure of microcircuits
S. P. Arsenichev, E. V. Grigor’ev, S. A. Zuev, V. V.
Starostenko, E. P. Taran
Taurida V.I. Vernadsky University
The paper is received on April 28, 2014
influence mechanisms of the electromagnetic fields are in-process considered
and systematized on the conducting structures of integral microcircuits. The
features of development of degradation processes are educed in thin film structures.
The values of thicknesses of conducting films at that there is a process of
transformation of energy of the electromagnetic field in acoustic waves are got.
Keywords: conducting film structures, influence
mechanisms, transformation of energy.