Journal of Radio Electronics. eISSN 1684-1719. 2025. ¹11

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DOI: https://doi.org/10.30898/1684-1719.2025.11.1

 

 

 

Investigation of the Influence of Sensitive Layer
Immobilization on the Electrical Characteristics
of a thin-film BAW Resonator as Determined
by Structural Parameters

 

N.M. Zhilin1,2,3, T.N. Ulaeva1,2,3, N.A. Chirikov1,2, V.N. Shchekaturova3, A.N. Kuznetsov1,2

 

1Omsk Scientific Center SB RAS (Institute of Radiophysics and Physical Electronics,
644024, Russia, Omsk, Marksa Ave., 15

2Omsk Research Institute of Instrument Engineering,
644071, Russia, Omsk, Maslennikova St., 231

3Dostoevsky Omsk State University,
644077, Russia, Omsk, Mira Ave., 55A

 

The paper was received October 2, 2025.

 

Abstract. The impact of a deposited sensing layer on the electrical characteristics of thin-film bulk acoustic wave (BAW) resonators with two Bragg reflector designs is examined: (i) six Mo-Ti quarter-wave pairs and (ii) a hybrid reflector of three Mo–Al pairs plus one Mo-SiO2 pair. A positive photoresist FP-383 served as the sensing material and was applied by drop-casting. Resonators employing the Mo-Al-SiO2 reflector maintain their frequency response and quality factor with negligible change, whereas Mo-Ti reflectors exhibit resonance-frequency shifts, a reduced resonant bandwidth and an increased quality factor. These behaviors point to the governing roles of residual stress and boundary conditions in device performance. The results highlight the need for careful reflector-material selection to enhance sensitivity and indicate strong potential for integrating BAW resonators into microelectronic gas sensors.

Key words: bulk acoustic wave (BAW), Bragg reflector, thin-film resonator, sensor, immobilization, sensing layer.

Financing: The work was carried out according to the state task of the Omsk Scientific Center SB RAS (project registration number 124022500291-6).

Corresponding author: Ulaeva Tatiana Nikolaevna, tanskaya-89@mail.ru

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For citation:

Zhilin N.M., Ulaeva T.N., Chirikov N.A., Shchekaturova V.N., Kuznetzov A.N. Investigation of the influence of sensitive layer immobilization on the electrical characteristics of a thin-film BAW resonator as determined by structural parameters. // Journal of Radio Electronics. – 2025. – ¹. 11. https://doi.org/10.30898/1684-1719.2025.11.1 (In Russian)