Estimation of Optical NEP of Titanium Hot-Electron Transition Edge Sensor Nanobolometers

A. N. Vystavkin,  A. G. Kovalenko, I. A. Cohn, A. S. Ilyin,  S. V. Shitov, O. V. Koryukin, A. V. Uvarov

Kotel'nikov Institute of Radio Engineering and Electronics of RAS
 

Received September 9, 2012

 

Abstract. The paper considers different superconducting titanium microstructures fabrication technology methods. An optimal method, in terms of superconducting transition point reproducibility, has been developed. IV curves and resistance temperature dependences were measured with different blackbody radiation source temperatures. The dependencies comparison allowed to estimate the noise equivalent power of a bolometer, fabricated using the proposed technology.

Keywords: Superconducting microelectronics, transition edge sensor, hot electrons.