"JOURNAL OF RADIO ELECTRONICS"  N 12, 2014

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MANIPULATION OF MICRO- AND NANOOBJECTS APPLYING A DEVICE WITH SHAPE MEMORY EFFECT

 

A.V. Mashirov1,V.A. Dikan2, A.V. Irzhak2, D.I. Zakharov2, P.V. Mazaev1,

A.M. Zhikharev1, A.P. Kamantsev1, V.S. Kalashnikov1, V.V. Koledov1,

A.V. Shelyakov3, V.G. Shavrov1

1Kotel’nikov Institute of Radio Engineering and Electronics of RAS, Moscow, Russia

2 NUST «MISiS», Moscow, Russia

3 NUNT «MEPHI», Moscow, Russia

 

The paper is received on December 10, 2014

 

Abstract. This work describes creation and research of a device for grabbing micro- and nanoobjects, so called “nanotweezers”, with operating body made of two-layer composite material consisting of rapidly quenched layer of Ti2NiCu with shape memory and amorphous layer of Pt. A certain way of manufacturing of such a material is proposed, by using localized ion etching and ion-beam stimulated chemical vapor deposition. Authors describe a construction of  “nanotweezers” they made using these techniques and also a series of experiments on grabbing and manipulation of real submicron-sized objects. A radiation of infrared semiconductor laser was used to perform actuation. A probability of manipulation of objects, like carbon nanotubes, graphene sheets, TaS3 whiskers and biological objects, was shown experimentally.

Keywords: bimetallic composite material, manipulation of micro- and nanoobjects, nanotweezers, shape memory effect.