STUDY
OF LOAD CHARACTERISTICS OF MICROACTUATOR WITH SHAPE MEMORY EFFECT USING
SCANNING PROBE MICROSCOPY
P. V. Mazaev1, A. V. Mashirov1, V. V. Koledov1,
D. V. Kolesov2, I. V. Yaminsky2, A. V. Irzhak3,4,
D. I. Zakharov3, V. A. Dikan3, A. P. Kamantsev1
1 - Kotelnikov Institute of Radio-engineering and Electronics of RAS,
Moscow, Russia
2 -
Lomonosov Moscow State University,
Moscow, Russia
3 - National University of Science and Technology «MISIS», Moscow,
Russia
4 - Institute of Microelectronics Technology and High Purity Materials,
Moscow Region, Russia
The paper is received on December 10, 2014
Abstract.
Recently
the micro- and nanoscale manipulation instruments based on shape memory effect
(SME) have been created by the method of selective ion etching. Possibilities
of the extensive use for various tasks of nanomanipulation, nanoprocessing,
nanomeasuring have been demonstrated through experiments of the transfer of the
carbon nanotubes and nanoparticles of different nature by the composite
nanotweezers. In this paper the force characteristics of the composite
microactuators with SME are studied. The thermoelastic properties measurement
technique for microscale composite actuators with SME based on stiffness
calibration of scanning probe microscopy cantilevers technology has been
developed. The stiffness of the microactuator’s samples based on Ti2NiCu
/ Pt composite with a length of 45...51 μm, a width of 1,9...2,5 μm, a thickness of 1 μm at a temperature in the range
of 20...100°C has been experimentally determined. Quantitative estimates of the
interaction force between the actuator and the test object based on
experimental data have been calculated. The experimental and theoretical
calculations do not disagree.
Keywords: shape memory effect, micromanipulator, nanomanipulator,
nanotweezers, Ti2NiCu, composite, actuator, cantilever, atomic force
microscopy, scanning probe microscopy, stiffness.
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