"JOURNAL OF RADIO ELECTRONICS"  N 1, 2015

contents             full texthtml,   pdf   

SME AMORPHOUS-CRYSTALLINE COMPOSITE OBTAINED BY FOCUSED ION BEAM

V. S. Afonina1, V. V. Koledov1, V. A. Dikan2, A. V. Irzhak2,3, A. P. Kamantsev1 

1 - Kotelnikov Institute of Radio-engineering and Electronics of RAS, Moscow, Russia

2 - National University of Science and Technology «MISIS», Moscow, Russia

3 - Institute of Microelectronics Technology and High Purity Materials, Chernogolovka,  Moscow REgion, Russia

 

The paper is received on January 15, 2015

 

Abstract. The interaction of a focused ion beam of Ga+ with the  surface of the annealed rapidly quenched from the melt ribbons of the Ti2NiCu alloys was investigated. The amorphous-crystalline composites and microactuators based on rapidly quenched shape memory alloy Ti2NiCu are obtained by Focused Ion Beam (FIB) treatment and studied. It is demonstrated that the amorphized layer may be formed by two types of impact: direct bombardment of the surface and material redeposition. Shape memory effect is demonstrated by reversible bending deformation during heating and cooling of the composites.

Key words: shape memory effect, bilayer composite, amorphization, Ti2NiCu, microactuator, focused ion beam.