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Журнал радиоэлектроники Электронный научный журнал · eISSN 1684-1719
2019, № 2 · ТВЕРДОТЕЛЬНАЯ ЭЛЕКТРОНИКА

Создание кольцевых и петлевых подвешенных структур на основе нанопроволок методом механической наносборки "снизу-вверх"

С.В. Фонгратовски1, В.В. Коледов1, А.П. Орлов1, А.В. Фролов1, А.М. Смолович1, П.В. Лега1, В.Г. Шавров1, В.Ч. Фам1,2,3, А.В. Иржак4,5,6,7, Т. Пекизех8,9, С. Бхатчатаррия10,11

1 ИРЭ им. В.А. Котельникова РАН, Москва, Россия
2 Московский физико-технический институт, Московская облаcть
3 Moscow Institute of Physics and Technology (State University), Россия
4 Институт микроэлектронной технологии и высокочистых веществ, Черноголовка
5 Institute of Microelectronic Technology and High Purity Materials of Russian Academy of Sciences, Россия
6 Национальный университет науки и технологии «МИСиС», Россия
7 National University of Science and Technology MISiS, Россия
8 Тегеранский технологический университет имени Тооси, Иран, Иран
9 Faculty of Electrical Engineering, K. N. Toosi University of Technology, Иран
10 Школа физики университета Витвотерстренд
11 School of Physics University of the Witwatersrand, ZAF
Полный текст (PDF) DOI: 10.30898/1684-1719.2019.2.14 УДК 620.3 EDN GKRIWR

Аннотация

Создание трехмерных упорядоченных наноструктур представляет важную проблему для научных исследований, наноэлектроники, наносенсорики, ввиду того, что разнообразные нанообъекты, обладающие полезными физическими и функциональными свойствами синтезируются большими массивами, а отбор, перенос и формирование трехмерных наноструктур должен проводиться инструментами, сравнимыми по размерам с манипулируемыми нанобъектами. В работе описаны результаты экспериментов по изготовлению образцов петлевых и кольцевых подвешенных структур из нанопроволок различного состава методом механической наносборки «снизу-вверх» при помощи нанопинцетов на основе сплава с эффектом памяти формы Ti2NiCu.

  • нанопроволоки
  • трехмерное наноманипулирование
  • углеродные нанотрубки
  • наносборка "снизу-вверх"
  • кольцевые структуры
  • эффект памяти формы
  • сплав Ti2NiCu
Abstract (in English)

Creating nano-wire based ring, loopoing and suspended structures by the method of "bottom-up" mechanical nanosport

The creation of 3D ordered nanostructures represents an important problem for scientific research, nano-electronics, and nano-sensorics, as a result of the fact that various nano-objects with useful physical and functional properties are synthesized by large arrays, but the selection, transfer and formation of three-dimensional nanostructures should be carried out using tools comparable in size to the manipulated nano-objects. This paper describes the results of fabricating of the samples of pig-tail and ring suspended structures of nanowires of different composition using the mechanical “bottom-up” assembling using nano-tweezers based on Ti2NiCu shape memory alloy. The nano-maripulation system used in the work includes a scanning electron microscope (SEM) and an ionic microscope with the focused ion beam system (FIB) CrossBeam Neon40 EsB (Carl Zeiss) with two Kleindiek nano-manipulators. The Kleindiek nanomanipulator is equipped with a nanogripper with a resistive microheater, which is located at the tip of a tungsten needle. The needle tip with nanogripper can be positioned with an accuracy of about 10 nm in the volume of the working chamber of the microscope. The nanotweezers are made of composite based on Ti2NiCu alloy with shape memory effect and have dimensions of 20x5x1 micron. The size of the controlled gap is 0 .... 1 μm. The temperature range of the thermoelastic martensitic transformation for this alloy is approximately 40-60 ° C. The process of nano-assembly of the functional structures in the configuration of rings, loops and suspended elements is carried out under the control of the SEM and includes operations: selection of individual nano-objects from a variety of pre-prepared, capture and separation of the nano-object, the formation of a functional structure, for example, rings and mechanical fastening to a substrate or in a three-dimensional construction, in a suspended state. Often, the nanowires of different nature form beams or “forest”, so an individual object, for example, a nanowire or its fragment, is held with the help of a nanogripper and is separated from the array. The formation of a loop or ring necessarily requires fixing at one point to impart torsional moment. Mechanical fixing can be accomplished using two nano-tweezers and two nano-manipulators. Electrical and mechanical contact can be achieved by applying ion-stimulated metal deposition in the FIB-CVD setup. A fixed nanowire can be bent or even twisted into a coil. As an example of the application of the proposed method, functional structures of CNTs decorated with Gd nanoparticles are presented.

Для цитирования

Фонгратовски С.В., Коледов В.В., Орлов А.П., Фролов А.В., Смолович А.М., Лега П.В., Шавров В.Г., Фам В.Ч., Иржак А.В., Пекизех Т., Бхатчатаррия С. Создание кольцевых и петлевых подвешенных структур на основе нанопроволок методом механической наносборки "снизу-вверх" // Журнал радиоэлектроники. – 2019. – № 2. https://doi.org/10.30898/1684-1719.2019.2.14

Литература

  1. Giazotto, F., Martнnez-Pйrez, M. J. The Josephson heat interferometer. Nature, 2012, Vol. 492(7429), pp. 401-407.
  2. Solinas P., Gasparinetti S., Golubev D., Giazotto F., Solinas P., Gasparinetti S., Golubev D., Giazotto F. A. Josephson radiation comb generator. Scientific reports, 2015, Vol. 5, pp. 12260.
  3. Guarcello C., Solinas P., Braggio A., Giazotto F. Phase-coherent solitonic Josephson heat oscillator. 2018. arXiv preprint arXiv:1803.02588.
  4. Cassidy M. C., Bruno A., Rubbert S., Irfan M., Kammhuber J., Schouten R. N., Kouwenhoven, L. P. Demonstration of an ac Josephson junction laser. 2017. Science, Vol. 355(6328), pp. 939-942.
  5. Giazotto F., Martнnez-Pйrez M. J., Solinas P. Coherent diffraction of thermal currents in Josephson tunnel junctions. 2013. Physical Review B, Vol. 88(9), 094506.
  6. Bogaerts W., De Heyn P., Van Vaerenbergh T., De Vos K., Kumar Selvaraja S., Claes T., Baets R. Silicon microring resonators. (2012). Laser & Photonics Reviews, Vol. 6(1), pp. 47-73.
  7. Matsko A. B., Savchenkov A. A., Strekalov D., Ilchenko V. S., Maleki L. Review of applications of whispering-gallery mode resonators in photonics and nonlinear optics. 2005. IPN Progress Report, Vol. 42(162), pp. 1-51.
  8. Fan X., White I. M., Shopova S. I., Zhu H., Suter J. D., Sun Y. Sensitive optical biosensors for unlabeled targets: A review. 2008, Analytica chimica acta, Vol. 620(1-2), pp. 8-26.
  9. Janissen R., Sahoo P. K., Santos C. A., da Silva A. M., von Zuben A. A., Souto D. E., Oliveira D. S. InP nanowire biosensor with tailored biofunctionalization: ultrasensitive and highly selective disease biomarker detection. 2017. Nano letters, Vol. 17(10), pp. 5938-5949.
  10. von Gratowski S., Koledov V., Shavrov V., Petrenko S., Irzhak A., Shelyakov A., Jede R. Advanced System for Nanofabrication and Nanomanipulation Based on Shape Memory Alloy. In Frontiers in Materials Processing, Applications, Research and Technology 2018. pp. 135-154. Springer, Singapore.
  11. Zhikharev A. M., Irzhak A. V., Beresin M. Y., Lega P. V., Koledov, V. V., Kasyanov N. N., Martynov G. S. New system for manipulation of nanoobjects based on composite Ti2NiCu/Pt nanotweezers with shape memory effect. Journal of Physics: Conference Series. 2016. Vol. 741(1), p. 012206.
  12. Bhattachataryya S., Koledov V., von Gratowski S., Coleman C., Churochkin,D., Zeigler A., Irzhak A. (2018, August). Bottom up Nano-integration Technique for the Fabrication of Novel Superconducting Quantum Interference Devices Based on Granular Superconducting Diamond. In 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), pp. 122-125.
  13. Zakharov D., Lebedev G., Irzhak, A., Afonina V., Mashirov A., Kalashnikov V., Shavrov V. Submicron-sized actuators based on enhanced shape memory composite material fabricated by FIB-CVD. Smart materials and structures, 2018. Vol. 21(5), 052001.
  14. Shelyakov A. V., Sitnikov N. N., Koledov V. V., Kuchin D. S., Irzhak A. I., Tabachkova, N. Y. Melt-spun thin ribbons of shape memory TiNiCu alloy for micromechanical applications. International Journal of Smart and Nano Materials, 2011. Vol. 2, pp. 66-68. DOI 10.1080/19475411.2011.567305