Получение тонкоплёночных покрытий оксидов ванадия методом парофазного химического осаждения из изопропоксида ванадила

Аннотация

Продемонстрирована методика получения оксидов ванадия различных стехиометрий из изопропоксида ванадила методом химического парофазного осаждения. Получены различные оксиды ванадия из ряда Магнелли в виде тонкоплёночных покрытий на поверхности кремния и сапфира. Нанесённые в атмосфере аргона при температурах от 220 ˚С до 290 ˚С покрытия оценивались по спектрам пропускания, комбинационного рассеяния и рентгеновской дифракции. В синтезированных полуаморфных структурах обнаружено четыре оксида (V₃O₅, VO₂, V₆O₁₃, V₂O₅) с разным их соотношением. В ряде образцов покрытий на кремниевых подложках при температуре 69 ˚С зафиксирован фазовый переход второго рода со скачком электрического сопротивления до 10 раз.

• оксид ванадия
• фазовый переход
• оптическое волокно
• тонкие плёнки

Abstract (in English)

Production of thin-film coatings of vanadium oxides by chemical vapor deposition from vanadyl isopropoxide

A technique for obtaining vanadium oxides of various stoichiometries from vanadyl isopropoxide by chemical vapor deposition is demonstrated. Various vanadium oxides from the Magnelli series have been obtained. Thin-film coatings are applied to the surface of silicon and sapphire. Coatings deposited in an argon flow at temperatures from 220 ˚C to 290 ˚C were evaluated by transmission spectra, Raman scattering and X-ray diffraction. Four oxides (V₃O₅, VO₂, V₆O₁₃, V₂O₅) with different ratios were found in the synthesized amorphous structures. In a number of coatings on silicon substrates, a phase transition of the second kind with a jump in electrical resistance up to 10 times at a temperature of 69 ˚C, was recorded.

Для цитирования

Литература

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