STUDY OF LOAD CHARACTERISTICS OF MICROACTUATOR WITH SHAPE MEMORY EFFECT USING SCANNING PROBE MICROSCOPY

P. V. Mazaev¹, A. V. Mashirov¹, V. V. Koledov¹, D. V. Kolesov², I. V. Yaminsky², A. V. Irzhak^3,4, D. I. Zakharov³, V. A. Dikan³, A. P. Kamantsev¹ 

1 - Kotelnikov Institute of Radio-engineering and Electronics of RAS, Moscow, Russia

2 - Lomonosov Moscow State University, Moscow, Russia

3 - National University of Science and Technology «MISIS», Moscow, Russia

4 - Institute of Microelectronics Technology and High Purity Materials, Moscow Region, Russia

 

The paper is received on December 10, 2014

 

Abstract. Recently the micro- and nanoscale manipulation instruments based on shape memory effect (SME) have been created by the method of selective ion etching. Possibilities of the extensive use for various tasks of nanomanipulation, nanoprocessing, nanomeasuring have been demonstrated through experiments of the transfer of the carbon nanotubes and nanoparticles of different nature by the composite nanotweezers. In this paper the force characteristics of the composite microactuators with SME are studied. The thermoelastic properties measurement technique for microscale composite actuators with SME based on stiffness calibration of scanning probe microscopy cantilevers technology has been developed. The stiffness of the microactuator’s samples based on Ti₂NiCu / Pt composite with a length of 45...51 μm, a width of 1,9...2,5 μm, a thickness of 1 μm at a temperature in the range of 20...100°C has been experimentally determined. Quantitative estimates of the interaction force between the actuator and the test object based on experimental data have been calculated. The experimental and theoretical calculations do not disagree.

Keywords: shape memory effect, micromanipulator, nanomanipulator, nanotweezers, Ti₂NiCu, composite, actuator, cantilever, atomic force microscopy, scanning probe microscopy, stiffness.