Journal of Radio Electronics. eISSN 1684-1719. 2026. ¹7
Full text in Russian (pdf)
DOI: https://doi.org/10.30898/1684-1719.2026.7.11
LABORATORY TECHNOLOGY OF MICROMANIPULATION
USING MICROPINCERS WITH SHAPE MEMORY EFFECT
TO CREATE SUSPENDED MICROSTRUCTURES BASED
ON WHISKERS OF FUNCTIONAL MATERIALS
S.R. Romanov1, V.V. Koledov1, M.V. Nikitin1, A.P. Orlov1, V.Ya. Pokrovsky1,
A.V. Shelyakov2, D.A. Khachatryan2, A.V. Kletsov2, A.K. Pogorelov2
1Kotelnikov IRE RAS,
125009, Russia, Moscow, Mokhovaya str., 11, b. 72National Research Nuclear University MEPhI (Moscow Engineering Physics Institute),
115409, Russia, Moscow, Kashirskoye shosse, 31
The paper was received June 18, 2026.
Abstract. A technology for manipulating whisker-like single crystals (whiskers) of quasi-one-dimensional charge-density-wave (Q1D CDW) semiconductors was developed for the fabrication of suspended structures. A current-controlled microgripper based on shape memory alloy (SMA) composite ribbons was created. A technique for capturing and fixing whiskers using a micromanipulator and a tungsten probe was developed, together with a method for contact formation employing a mask transferred by the microgripper followed by metal deposition. Resonant modes of high-frequency electromechanical oscillations in a suspended TaS₃ whisker were detected and investigated using the heterodyne method.
Key words: micromanipulation, microgripper, quasi-one-dimensional semiconductor, shape memory alloy, charge-density waves, electromechanical oscillations.
Financing: This work was supported by the State Assignment of the Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences.
Corresponding author: Romanov Sergey Romanovich, romanov_sr@bk.ru
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For citation:
Romanov S.R., Koledov V.V., Nikitin M.V., Orlov A.P., Pokrovsky V.Ya., Shelyakov A.V., Khachatryan D.A., Kletsov A.V., Pogorelov A.K. Laboratory technology of micromanipulation using micropincers with shape memory effect to create suspended microstructures based on whiskers of functional materials. // Journal of Radio Electronics. – 2026. – ¹. 7. https://doi.org/10.30898/1684-1719.2026.7.11 (In Russian)