Journal of Radio Electronics. eISSN 1684-1719. 2024. №6
Full text in Russian (pdf)
DOI: https://doi.org/10.30898/1684-1719.2024.6.10
Possibility of creating effective surface
acoustic waves devices
S.G. Suchkov, V.A. Nikolaevtsev, D.S. Suchkov
Saratov State University named after N.G. Chernyshevsky
410012, Russia, Saratov, Astrakhanskaya st., 83
The paper was received April 6, 2024.
Abstract. In the paper the interaction of surface acoustic waves (SAWs) with reflectors and interdigital transducers (IDTs) with high aspect ratio electrodes (HAR-electrodes) are investigated. The conditions for the SAW resonant reflection and propagation and the effective IDT conversion of the SAW power into electrical power at the load have been obtained. The real possibility of the effective SAW devices creation (filters, delay lines, resonators, RFID tags) at frequencies above 6 GHz (up to 12-15 GHz) using HAR-electrodes was demonstrated.
Key words: acoustoelectronics, surface acoustic wave, high-aspect-ratio electrodes, SAW RFID tags, SAW delay lines, SAW resonators, SAW filters.
Corresponding author: Nikolaevtsev Viktor Andreevich, nikolaevcev@ya.ru
References
1. Yu.V. Gulyaev, S.G. Suchkov, S.S. Yankin, S.A. Nikitov, D.S. Suchkov, V.P. Plessky SAW Radio-Frequency Identification Tag for the 6-GHz Band // Journal of Communications Technology and Electronics, 2015, V. 60, № 4, P. 402-405. https://doi.org/10.7868/S0033849415040087
2. K. Yamanouchi, J. A. Qureshi, H. Odagawa, 5-15 GHz Range Surface Acoustic Wave Filters Using Electrode Thickness Difference Type And New Reflector Bank Type Of Unidirectional Interdigital Transducers. // Proceedings of the Ultrasonics Symposium, P. 61–64, 1997. https://doi.org/10.1109/ULTSYM.1997.662980
3. M.A. Mohammad, J. Conway, B. Liu, Y. Yang, T.-L. Ren, High Performance Lithium Niobate Surface Acoustic Wave Transducers In The 4–12 Ghz Super High Frequency Range // Journal of Vacuum Science and Technology B, V. 33, P. 06F401, 2015. https://doi.org/10.1116/1.4935561
4. A. Badar, A. Dow, C. Popov, U. Schmid, N.P. Kheran, Super-High-Frequency SAW Transducer Utilizing AlN/Ultrananocrystalline Diamond Architectures // IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, V. 60, №. 8, P. 1581-1586, 2013. https://doi.org/10.1109/TUFFC.2013.2738
5. N.-H. Chen, J.-C. Huang, C.-Y. Wang, F.-S. Huang, Fabrication Of A GHz Band Surface Acoustic Wave Filter By UV-Nanoimprint With An HSQ Stamp // Journal of Micromechanics and Microengineering, V. 21, P.045021, 2011. https://doi.org/10.1088/0960-1317/21/4/045021
6. S.G. Suchkov, S.S. Yankin, S.A. Nikitov, I.A. Shatrova. Scattering of surface acoustic waves by a system of topographical irregularities comparable to a wavelength // Journal of Communications Technology and Electronics, 2014, V. 59, № 4, P. 373-378. https://doi.org/10.7868/S0033849414040123
7. Nanofabrication Techniques Dominique Mailly Laboratoire de Photonique et de Nanostructures Marcoussis // [E-resource]. URL:
https://magnetism.eu/esm/2005-constanta/slides/mailly-slides.pdf
8. S. Huang, C. Huard, S. Shim, S.K. Nam, I.-C. Song, S. Lu, M.J. Kushner. Plasma Etching Of High Aspect Ratio Features In SiO2 Using Ar/C4F8/O2 Mixtures: A Computational Investigation // Journal of Vacuum Science and Technology A, V. 37, P. 031304, 2019. https://doi.org/10.1116/1.5090606
9. S.G. Suchkov, D.A. Barinov. The anisotropy of thin metal films and its effect on the characteristics of SAW devices // Journal of Communications Technology and Electronics, 2002, V. 47, №4, P. 458-460.
10. The AC/DC Module User's Guide // [E-resource]. URL:
https://doc.comsol.com/5.4/doc/com.comsol.help.acdc/ACDCModuleUsersGuide.pdf
11. Akustoelektronnye ustrojstva obrabotki i generacii signalov. Principy raboty, rascheta i proektirovaniya / pod red. Yu.V.Gulyaeva. – M. : Radiotekhnika, 2012. – 571 p.
12. Handbook of physical quantities / about the author I.S. Grigoriev, E.Z. Meilikhov, A.A. Radzig – CRC Press, 1997. – 1548 p.
13. S.G. Suchkov, S.A. Nikitov, A.A. Pilovets, S.V. Komkov, V.A. Nikolaevcev, A.N. Litvinenko, D.S. Suchkov. Mnogodiapazonnaya radiochastotnaya metka na poverkhnostnykh akusticheskikh volnakh dlya antikollizionnykh sistem identifikacii // Zhurnal radioelektroniki: elektronnyj zhurnal. 2016, N12. URL:
http://jre.cplire.ru/jre/dec16/5/text.pdf
14. V. Plessky, L. Reindl, Review on SAW RFID Tags // IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, V. 57. No. 3. P. 654-668, 2010. https://doi.org/10.1109/TUFFC.2010.1462
For citation:
Suchkov S.G., Nikolaevtsev V.A., Suchkov D.S. Possibility of creating effective surface acoustic waves devices at frequency above 6 GHz // Journal of Radio Electronics. – 2024. - №. 6. https://doi.org/10.30898/1684-1719.2024.6.10 (In Russian)