Zhurnal Radioelektroniki - Journal of Radio Electronics. ISSN 1684-1719. 2020. No. 3
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DOI 10.30898/1684-1719.2020.3.14

UDC 535.016

 

Study of the influence of graphene sublayer on the morphology, optical and electrical properties of thin copper films

D. I. Yakubovsky, R. V. Kirtaev

Moscow Institute of Physics and Technology (national research university), 141701, Moscow Region, Dolgoprudny, Institutskiy per. 9

 

The paper is received on March 19, 2020

 

Abstract. In recent time, the graphene monolayer is a widely used functional material in various devices of nano- and optoelectronics. It is known that the kinetics of metal growth on graphene surface can significantly differ from the growth on a conventional substrates (Si, glass), which can be a restriction for the fabrication of continuous thin metal films. Therefore, the study of the growth processes of thin films of metal on graphene and the study of their properties are important for the development of graphene-metal multilayer structures fabrication. In this paper, we study the optical, electrical properties and structural morphology of thin copper films on graphene and compare them with copper films of the same thickness on glass substrate. It was shown that the growth of copper on graphene leads to the formation of nanoparticles, which size can be controlled by the modification of substrate temperature. In this paper we also demonstrate the method of deposition of continuous thin copper films on graphene.

Key words: thin films, graphene, dielectric permittivity, ellipsometry.

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For citation:

Yakubovsky D.I., Kirtaev R.V. Study of the influence of graphene sublayer on the morphology, optical and electrical properties of thin copper films. Zhurnal Radioelektroniki - Journal of Radio Electronics. 2020. No. 3. Available at http://jre.cplire.ru/jre/mar20/14/text.pdf

DOI  10.30898/1684-1719.2020.3.14