"JOURNAL OF RADIO ELECTRONICS" (Zhurnal Radioelektroniki ISSN 1684-1719, N 11, 2016

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Miniature parallel micromanipulator

I. A. Cohn, A. S. Ilin, A. G. Kovalenko
Kotelnikov Institute of Radioengineering and Electronics of RAS

The paper is received on October 20, 2016

 

Abstract. Precision positioning is a common task in modern micro- and nanoelectronics. In our case it was a precise placement of detector microchip on an immersion lense. A serial manipulator is a common choice for micromanipulation, however making a compact design is not an easy task. This paper covers a parallel sub-micron positioning manipulator, compact enough to fit in a scanning electron microscope vacuum chamber. The actuation is performed by pulling the sample by four tethers with stepper motors, and a worm drive. An ultimate expected precision is 60 nanometers. The positioning is done manually by the operator, controlled by the operator via SEM imaging. A further development may incorporate a fully automatic system with image recognition, and a proportional-integral positioning algorithm, and an addition of a shape memory or piezo effect micromanipulator to increase positioning precision to 1 nanometer.

Key words: micromanipulator, parallel manipulator, microelectronics, nanoelectronics, immersion lense, electron microscope.

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