"JOURNAL OF RADIO ELECTRONICS" (Zhurnal Radioelektroniki ISSN 1684-1719, N 11, 2016

contents             full textpdf   

Miniature parallel micromanipulator

I. A. Cohn, A. S. Ilin, A. G. Kovalenko
Kotelnikov Institute of Radioengineering and Electronics of RAS

The paper is received on October 20, 2016


Abstract. Precision positioning is a common task in modern micro- and nanoelectronics. In our case it was a precise placement of detector microchip on an immersion lense. A serial manipulator is a common choice for micromanipulation, however making a compact design is not an easy task. This paper covers a parallel sub-micron positioning manipulator, compact enough to fit in a scanning electron microscope vacuum chamber. The actuation is performed by pulling the sample by four tethers with stepper motors, and a worm drive. An ultimate expected precision is 60 nanometers. The positioning is done manually by the operator, controlled by the operator via SEM imaging. A further development may incorporate a fully automatic system with image recognition, and a proportional-integral positioning algorithm, and an addition of a shape memory or piezo effect micromanipulator to increase positioning precision to 1 nanometer.

Key words: micromanipulator, parallel manipulator, microelectronics, nanoelectronics, immersion lense, electron microscope.


1.    Du, E., Hongliang Cui, and Zhenqi Zhu. "Review of nanomanipulators for nanomanufacturing." International Journal of Nanomanufacturing 1.1 (2006): 83-104.

2.    D. F. Filipovic, S. S. Gearhart and G. M. Rebeiz, "Double-slot antennas on extended hemispherical and elliptical silicon dielectric lenses," in IEEE Transactions on Microwave Theory and Techniques, vol. 41, no. 10, pp. 1738-1749, Oct 1993.

3.    Uvarov, A. V., Shitov, S. V., Uzawa, Y., & Vystavkin, A. N. (2007). Tolerance Analysis of THz-range Integrated Lens Antennas. In Proceedings of 2007 International Symposium on Antennas and Propagation (ISAP2007) (pp. 20-24).

4.    Notash L. On the Solution Set for Positive Wire Tension With Uncertainty in Wire-Actuated Parallel Manipulators. ASME. J. Mechanisms Robotics. 2016;8(4):044506-044506-9.

5.    GOSSELIN, C. (2014). Cable-driven parallel mechanisms: state of the art and perspectives. Mechanical Engineering Reviews, 1(1), DSM0004-DSM0004.

6.    Jain, R. K., Majumder, S., Ghosh, B., & Saha, S. (2015). Deflection control for piezoelectric actuator through voltage signal and itís application in micromanipulation. Mechanical Systems and Signal Processing, 62, 305-323.

7.    Shelyakov, A. V., Sitnikov, N. N., Menushenkov, A. P., Koledov, V. V., & Irjak, A. I. (2011). Nanostructured thin ribbons of a shape memory TiNiCu alloy. Thin Solid Films, 519(15), 5314-5317.