positioning is a common task in modern micro- and nanoelectronics. In our case
it was a precise placement of detector microchip on an immersion lense. A
serial manipulator is a common choice for micromanipulation, however making a
compact design is not an easy task. This paper covers a parallel sub-micron
positioning manipulator, compact enough to fit in a scanning electron microscope
vacuum chamber. The actuation is performed by pulling the sample by four
tethers with stepper motors, and a worm drive. An ultimate expected precision
is 60 nanometers. The positioning is done manually by the operator, controlled
by the operator via SEM imaging. A further development may incorporate a fully
automatic system with image recognition, and a proportional-integral
positioning algorithm, and an addition of a shape memory or piezo effect
micromanipulator to increase positioning precision to 1 nanometer.
Key words: micromanipulator,
parallel manipulator, microelectronics, nanoelectronics, immersion lense,
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