"JOURNAL OF RADIO ELECTRONICS" (Zhurnal Radioelektroniki ISSN 1684-1719, N 10, 2019

contents of issue      DOI  10.30898/1684-1719.2019.10.12     full text in Russian (pdf)  

UDC 537.9

Multilayer structures based on carbon nanowalls and aluminum nitride in field emission cathodes


S. A. Nalimov 1, S. A. Bagdasaryan 2, A. I. Yurin 3, E. R. Pavlyukova 4


1 Central Research Technological Institute “Technomash”, 4, Ivan Franko Str., Moscow, 121108, Russia

2 Scientific engineering center “Technological developments of telecommunication and radio frequency identification”, JSC, 1 (4), Sukharevskaya Sq., Moscow 127051, Russia

3  High School of Economy, Tallinskaya str., 34, Moscow 123458, Russia

4  Moscow Institute of Physics and Technology (State University), 9, Institutskiy Pereulok, Dolgoprudny, Moscow Reg., 141701, Russia


The paper is received on October 22, 2019


Keywords: carbon nanowalls, aluminum nitride films, layered structures, field emission cathodes.


1. Belyanin À.F., Nalimov S.A., Luchnikov A.P., Bagdasaryan A.S. Properties of planar structures based on policluster films of diamond and AlN.  IOP Conference Series: Materials Science and Engineering 6. "6th International Conference: Modern Technologies for Non-Destructive Testing". 2018. P.012041. DOI: 10.1088/1757-899X/289/1/012041.

2. Collins J.L. Diamond-like carbon (DLC) – a review.  Industrial diamond review. 1998. Vol.58. No.578. P.90–92.

3. Belyanin A.F., Bagdasaryan A.S. Layered structure on the basis of films of policluster diamond and AlN for the devices on surface acoustic waves. Uspekhi sovremennoi radioelektroniki - Achievements of Modern Radio electronics. 2017. No.3. P.30–38. (In Russian)

4. Spitsyn B.V., BlautBlachev A.N., Bouilov L.L., Zhirnov V.V., Bormatova L.V., Givargizov E.I., Belyanin A.F., Pashchenko P.V. Field emitters based on Si tips with AlN coating // Diamond and Related Materials. 1998. ¹ 7. ¹ 2–5. P. 692–694.

5. Busta H.H., Chen J.M., Shen Z., Jansen K., Rizkowski S., Matey J., Lanzillotto A. Characterization of electron emitters for miniature x-ray sources // Journal of Vacuum Science & Technology B. 2003. Vol. 21. Ð. 344–349.

     DOI 10.1116/1.1529657

6. Tzeng Y., Chen C-L., Chen Y-Y., Liu C-Y. Carbon nanowalls on graphite for cold cathode applications.  Diamond and Related Materials. 2010. Vol.19 (2–3). P.201–204. DOI 10.1016/j.diamond.2009.08.005

7. Wang H-X., Jiang N., Zhang H., Hiraki A. Growth of a three dimensional complex carbon nanoneedle electron emitter for fabrication of field emission devices.  Carbon. 2010. Vol.48. P.4483–4488. DOI 10.1016/j.carbon.2010.08.008

8. Belyanin A.F., Borisov V.V., Samoylovich M.I., Bagdasarian A.S. On the Effect of Irradiation and Heat Treatment on the Structure and Field-Emission Properties of Carbon Nanowalls. Poverkhnost'. Rentgenovskiye, sinkhrotronnyye i neytronnyye issledovaniya -  Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 2017. Vol.11. No.2. P.295–304.  DOI: 10.7868/S0207352817030052  (In Russian)

9. Belyanin À.F., Borisov V.V., Bagdasaryan A.S. Nanostructured carbon materials in emission electronics. Rossiiskii tehnologicheskii zhurnal - Russian Technological Journal. 2017. Vol. 5. No.3. P.22–40. (In Russian)

10. Belyanin À.F., Borisov V.V., Timofeev M.A., Lamskiy A.N. Cold cathodes based on carbonic nanostructured layered structures. Tekhnologiya i konstruirovanie v elektronnoi apparature -Technology and design in electronic equipment. 2013. No.4. P.31–36. (In Russian)

11. Wang C.C., Chiu M.C., Shiao M.H., Shieua F.S. Characterization of AlN thin films prepared by unbalanced magnetron sputtering. Journal of The Electrochemical Society. 2004. Vol.151. No.10. P.252–256.

12. Samoylovich M.I., Bovtun V., Rinkevich A.B., Belyanin À.F., Klescheva S.M., Kempa M., Nuzhnyy D. Spatial nonuniform materials on based opal matrices.  Inzhenernaya fizika - Engineering Physics. 2010. No.6. P.29–38 (In Russian)

13. Rinkevich A.B., Burkhanov A.M., Samoilovich M.I., Belyanin A.F., Kleshcheva S.M., Kuznetsov E.A. Three-dimensional nanocomposite metal dielectric materials on the basis of opal matrices. Russian Journal of General Chemistry. 2013. Vol.83. No.11. P.2148–2158.

14. Tzeng Y, Chen W. L, Wu C., Lo J-Y., Li C-Y. The synthesis of graphene nanowalls on a diamond film on a silicon substrate by direct-current plasma chemical vapor deposition. Carbon. 2013. V. 53. P. 120–129.

    DOI 10.1016/j.carbon.2012.10.038

15. Pimenta M.A., Dresselhaus G., Dresselhaus M.S., Cancado L.G., Jorio A., Saito R. Studying disorder in graphite-based systems by Raman spectroscopy.  Physical Chemistry Chemical physics. 2007. Vol. 9. P. 1276–1291.

     DOI 10.1039/b613962k

16. Ferrari A.C. Raman spectroscopy of graphene and graphite: Disorder, electron-phonon coupling, doping and nanodiabatic effects // Solid state communications. 2007. Vol.143. P.47–57.    DOI 10.1016/j.ssc.2007.03.052

17. Thornton J.Di-M. Carbon Nanowalls: Processing, Structure and Electrochemical Properties. A dissertation submitted to the Graduate Faculty of North Carolina State University. 2011. Ð. 55.

18. Shang N.G., Staedler T., Jiang X. Radial textured carbon nano flake spherules.  Applied Physics Letters. 2006. Vol.89. P.103-112.   DOI 10.1063/1.2346314

19. Ferrari A.C., Meyer J.C., Scardaci V., Casiraghi C., Lazzeri M., Mauri F., Piscanec S., Jiang D., Novoselov K.S., Roth S., Geim A.K. Raman spectrum of graphene and graphene layers. Physical Review Letters. 2006. Vol. 97. 187401.

     DOI 10.1103/PhysRevLett.97.187401

20. Oliveira C., Otani C., Maciel H.S. et al. Raman active E2 modes in aluminum nitride films.  Journal of Materials Science: Materials in Electronics. 2001. Vol.12. P.259–262.

21. Liu L., Liu B., Edgara J.H., Rajasingam S., Kuball M. Raman characterization and stress analysis of AlN grown on SiC by sublimation.  Journal of Applied Physics. 2002. Vol. 92. No.9. P.5183–5188.


For citation:

S. A. Nalimov, S. A. Bagdasaryan, A. I. Yurin, E. R. Pavlyukova. Multilayer structures based on carbon nanowalls and aluminum nitride in field emission cathodes. Zhurnal Radioelektroniki - Journal of Radio Electronics. 2019. No. 10. Available at http://jre.cplire.ru/jre/oct19/12/text.pdf

DOI  10.30898/1684-1719.2019.10.12