c1.gif (954 bytes) "JOURNAL OF RADIOELECTRONICS" N 1, 2000

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RESONATOR CONTROL OF CONDUCTANCE HOMOGENEITY
OF SEMICONDUCTOR WAFERS

O.G. Koshelev,  E.A. Forsh
Department of Physics, Moscow State University

Received January 27, 2000

A metod to determine the conductivity dependence versus distance from the surface of a high resistivity semiconductor wafer is discussed (considerated). By one dimension computer calculations it was shown that this inverse problem may be solved by Q-factor measurements of open confocal resonator. The measurements have to made for several frequencies at four positions of the wafer in the resonator waist plane.

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