ASYMMETRIZATION
OF SPATIAL DISTRIBUTION OF DELTA-DOPANT DURING OVERGROWTH
E.L.
Pankratov
Institute
for Physics of Microstructures, Nizhny Novgorod, Russia
Received January 4, 2007
The analysis of dopant
dynamics in delta-doped area of a multilayer structure during overgrowth of the
dopant by an overlayer has been done based on proposed in the paper "macroapproach". Some reasons of asymmetrization of dopant distribution, which
has been recently shown by experiment did not detected by systematically used
in papers “microapproach”, were illustrated. For an example of multilayer
structure spreading of delta-layer estimation has been done .
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