Резонатор для измерения диэлектрической проницаемости тонких плёнок

A resonator for measuring the dielectric constant of thin films

In this paper, a resonator of rectangular cross-section with a long slit hole along the entire wide wall is considered. A basic unit of a measurement system is a scalar network analyzer R2-61. The limits of measurement depend on the ratio of the sample volume to the volume of the resonator, the coupling coefficient of the diaphragm, the accuracy of the frequency measurement, the reflection coefficient, as well as the properties of the studied material. The absolute values of the real and imaginary parts of the dielectric constant vary widely, which is usually associated with the composition and structure of the material. This may be especially true for measurements of thin-film materials. To expand the possibilities of studying various films, a modified rectangular resonator with a slit hole along the entire wide wall was developed and manufactured. The volume of the measured sample in such a resonator can vary widely by increasing the length of the sample. The resonator is designed to operate at fixed frequencies: 8.33 GHz and 10.15 GHz. Checking the performance of the experimental setup with a modified resonator is confirmed by the measuring characteristics of real samples of resistive paper. A comparative analysis of the absolute values of the real and imaginary parts of the dielectric permittivity of the paper obtained by independent methods showed a good agreement.