Миниатюрный параллельный микроманипулятор

Abstract

Precision positioning is a common task in modern micro- and nanoelectronics. In our case it was a precise placement of detector microchip on an immersion lense. A serial manipulator is a common choice for micromanipulation, however making a compact design is not an easy task. This paper covers a parallel sub-micron positioning manipulator, compact enough to fit in a scanning electron microscope vacuum chamber. The actuation is performed by pulling the sample by four tethers with stepper motors, and a worm drive. An ultimate expected precision is 60 nanometers. The positioning is done manually by the operator, controlled by the operator via SEM imaging. A further development may incorporate a fully automatic system with image recognition, and a proportional-integral positioning algorithm, and an addition of a shape memory or piezo effect micromanipulator to increase positioning precision to 1 nanometer.

• micromanipulator
• parallel manipulator
• microelectronics
• nanoelectronics
• immersion lense
• electron microscope

Аннотация (на русском)

Миниатюрный параллельный микроманипулятор

В современной микро и наноэлектронике нередко возникает необходимость прецизионного позиционирования. В данной работе рассмотрен манипулятор с субмикронным позиционированием, габариты которого допускают размещение в камере растрового электронного микроскопа.

For citation

References

1. Du, E., Hongliang Cui, and Zhenqi Zhu. "Review of nanomanipulators for nanomanufacturing." International Journal of Nanomanufacturing 1.1 (2006): 83-104.
2. D. F. Filipovic, S. S. Gearhart and G. M. Rebeiz, "Double-slot antennas on extended hemispherical and elliptical silicon dielectric lenses," in IEEE Transactions on Microwave Theory and Techniques, vol. 41, no. 10, pp. 1738-1749, Oct 1993.
3. Uvarov, A. V., Shitov, S. V., Uzawa, Y., & Vystavkin, A. N. (2007). Tolerance Analysis of THz-range Integrated Lens Antennas. In Proceedings of 2007 International Symposium on Antennas and Propagation (ISAP2007) (pp. 20-24).
4. Notash L. On the Solution Set for Positive Wire Tension With Uncertainty in Wire-Actuated Parallel Manipulators. ASME. J. Mechanisms Robotics. 2016;8(4):044506-044506-9.
5. GOSSELIN, C. (2014). Cable-driven parallel mechanisms: state of the art and perspectives. Mechanical Engineering Reviews, 1(1), DSM0004-DSM0004.
6. Jain, R. K., Majumder, S., Ghosh, B., & Saha, S. (2015). Deflection control for piezoelectric actuator through voltage signal and it's application in micromanipulation. Mechanical Systems and Signal Processing, 62, 305-323.
7. Shelyakov, A. V., Sitnikov, N. N., Menushenkov, A. P., Koledov, V. V., & Irjak, A. I. (2011). Nanostructured thin ribbons of a shape memory TiNiCu alloy. Thin Solid Films, 519(15), 5314-5317.