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Journal of Radio Electronics Online scientific journal · eISSN 1684-1719
2024, № 11 · SOLID STATE ELECTRONICS

Bolometers with suspended absorbers

M.A. Tarasov1, A.A. Gunbina1,2, A.M. Chekushkin1, R.A. Yusupov1, R.K. Kozulin1, M. Fominskii1

1 Kotelnikov IRE RAS, Moscow, Russia
2 A.V. Gaponov-Grekhov Institute of Applied Physics RAS, Nizhnii Novgorod, Russia
Full text DOI: 10.30898/1684-1719.2024.11.30 UDC 535.231.62 EDN MUQJBJ

Abstract

A technology for manufacturing suspended bridges to improve the performance of superconducting micro- and nanodevices, sensors and electronic coolers is described. Samples of bolometers and electron coolers of the superconductor-insulator-normal metal-insulator-superconductor (SINIS) structure have been fabricated, in which the strip of normal metal does not touch the substrate, but hangs between the banks of superconducting aluminum. The fabrication technology involves isotropic chemical etching of aluminum and critical point drying, which allows the superconductor layer under the normal bridge to be removed and prevents the bridge from sagging and sticking to the substrate. The current-voltage characteristics of such devices were measured at a temperature of 0.3 K.

  • bolometers
  • Superconducting tunnel junctions
  • critical point drying
  • electron cooling
  • Suspended bridges
Аннотация (на русском)

Болометры с подвешенными абсорберами

Описана технология изготовления подвешенных мостиков для улучшения характеристик сверхпроводниковых микро и наноустройств датчиков и электронных охладителей. Изготовлены образцы болометров и электронных охладителей структуры сверхпроводник-изолятор-нормальный металл-изолятор-сверхпроводник (СИНИС), у которых полоска нормального металла не касается подложки, а висит между берегами из сверхпроводящего алюминия. Технология изготовления включает изотропное химическое травление алюминия и сушку в критической точке, что позволяет удалить слой сверхпроводника под нормальным мостиком и избежать провисания и прилипания мостика к подложке. Измерены вольтамперные характеристики таких устройств при температуре 0.3 К.

For citation

Tarasov M.A., Gunbina A.A., Chekushkin A.M., Yusupov R.A., Kozulin R.K., Fominskii M. Bolometers with suspended absorbers // Journal of Radio Electronics. – 2024. – No. 11. https://doi.org/10.30898/1684-1719.2024.11.30

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